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Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

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Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

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Montoliu, C.; Ferrando Jódar, N.; Gosalvez Ayuso, MA.; Cerdá Boluda, J.; Colom Palero, RJ. (2013). Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining. Journal of Micromechanics and Microengineering. 23(7). https://doi.org/10.1088/0960-1317/23/7/075017

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Título: Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining
Autor: Montoliu, C Ferrando Jódar, Néstor Gosalvez Ayuso, Miguel Angel Cerdá Boluda, Joaquín Colom Palero, Ricardo José
Entidad UPV: Universitat Politècnica de València. Instituto de Instrumentación para Imagen Molecular - Institut d'Instrumentació per a Imatge Molecular
Universitat Politècnica de València. Departamento de Ingeniería Electrónica - Departament d'Enginyeria Electrònica
Fecha difusión:
Resumen:
The use of atomistic methods, such as the continuous cellular automaton (CCA), is currently regarded as an accurate and efficient approach for the simulation of anisotropic etching in the development of micro-electro-mechanical ...[+]
Palabras clave: SINGLE-CRYSTAL SILICON , UNIFIED MODEL , 3-DIMENSIONAL SIMULATIONS , CELLULAR-AUTOMATON , KOH , LITHOGRAPHY , DEPOSITION , ALGORITHMS , MORPHOLOGY , EVOLUTION
Derechos de uso: Reserva de todos los derechos
Fuente:
Journal of Micromechanics and Microengineering. (issn: 0960-1317 ) (eissn: 1361-6439 )
DOI: 10.1088/0960-1317/23/7/075017
Editorial:
IOP Publishing: Hybrid Open Access
Versión del editor: http://dx.doi.org/10.1088/0960-1317/23/7/075017
Código del Proyecto:
info:eu-repo/grantAgreement/MICINN//BES-2011-045940/ES/BES-2011-045940/
Agradecimientos:
This work has been supported by the Spanish FPI-MICINN BES-2011-045940 grant and the Ramon y Cajal Fellowship Program by the Spanish Ministry of Science and Innovation. Also, we acknowledge support by the JAE-Doc grant ...[+]
Tipo: Artículo

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