Larrea-Luzuriaga, Roberto AlejandroGutiérrez Campo, Ana MaríaHurtado Montañés, JuanRamirez, J. M.Garrido, B.Sanchis Kilders, Pablo2017-03-302017-03-302017-02-010146-9592https://riunet.upv.es/handle/10251/79275In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer sandwiched between amorphous silicon and a silicon-on-insulator. The measured coupling losses are about 4 dB with a 3 dB bandwidth of 38 nm. The fully etched configuration allows the fabrication in a single lithography step.Reserva de todos los derechosGratingsIntegrated optics devicesFibers, polarization-maintainingWaveguidesPhotonic integrated circuits.TEORIA DE LA SEÑAL Y COMUNICACIONESArtículo10.1364/OL.42.000490Abierto