This is part I of a series of two papers dedicated to the presentation of a novel, large throughput, experimental procedure to determine the three-dimensional distribution of the etch rate of silicon in a wide range of ...
As a sequel to part I (Gosalvez et al J. Micromech. Microeng. 12 125007), the present paper is part II of a series of two papers dedicated to the presentation of a novel, large-throughput, experimental procedure to determine ...
An evolutionary algorithm is presented for the automated calibration of the continuous cellular automaton for the simulation of isotropic and anisotropic wet chemical etching of silicon in as many as 31 widely different ...