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Listar por autor "Gosalvez Ayuso, Miguel Angel"

Mostrando ítems 1-6 de 6

Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

Ferrando Jódar, Néstor; Gosalvez Ayuso, Miguel Angel; Colom Palero, Ricardo José (IOP Publishing: Hybrid Open Access, 2012-02)

Anisotropic wet chemical etching of quartz is a bulk micromachining process for the fabrication of micro-electro-mechanical systems (MEMS), such as resonators and temperature sensors. Despite the success of the continuous ...
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Gosalvez Ayuso, Miguel Angel; Pal, Prem; Ferrando Jódar, Néstor; Hida, Hirotaka; Sato, Kazuo (IOP Publishing, 2011-12)

This is part I of a series of two papers dedicated to the presentation of a novel, large throughput, experimental procedure to determine the three-dimensional distribution of the etch rate of silicon in a wide range of ...
Implementación del método Level Set para la simulación del proceso químico de atacado anisótropo húmedo aplicado para la microfabricación

Montoliu Álvaro, Carles (Universitat Politècnica de València, 2013-02-06)

[ES] En el presente trabajo se ha implementado el método Level Set (LS) para poder ser aplicado para simular el proceso de atacado anisótropo húmedo utilizado para la fabricación de microestructuras. En la actualidad para ...
Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

Montoliu, C; Ferrando Jódar, Néstor; Gosalvez Ayuso, Miguel Angel; Cerdá Boluda, Joaquín; Colom Palero, Ricardo José (IOP Publishing: Hybrid Open Access, 2013-07)

The use of atomistic methods, such as the continuous cellular automaton (CCA), is currently regarded as an accurate and efficient approach for the simulation of anisotropic etching in the development of micro-electro-mechanical ...
Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Gosalvez Ayuso, Miguel Angel; Pal, Prem; Ferrando Jódar, Néstor; Sato, Kazuo (IOP Publishing, 2011-12)

As a sequel to part I (Gosalvez et al J. Micromech. Microeng. 12 125007), the present paper is part II of a series of two papers dedicated to the presentation of a novel, large-throughput, experimental procedure to determine ...
Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton

Gosalvez Ayuso, Miguel Angel; Ferrando Jódar, Néstor; Xing, Yan; Pal, Prem; Sato, Kazuo; Cerdá Boluda, Joaquín; Gadea Gironés, Rafael (IOP Publishing: Hybrid Open Access, 2011-06)

An evolutionary algorithm is presented for the automated calibration of the continuous cellular automaton for the simulation of isotropic and anisotropic wet chemical etching of silicon in as many as 31 widely different ...

Mostrando ítems 1-6 de 6

Listar por autor "Gosalvez Ayuso, Miguel Angel"

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Listar por autor "Gosalvez Ayuso, Miguel Angel"