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Listar por palabra clave "Anisotropic wet chemical etching"

Mostrando ítems 1-2 de 2

Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

Ferrando Jódar, Néstor; Gosalvez Ayuso, Miguel Angel; Colom Palero, Ricardo José (IOP Publishing: Hybrid Open Access, 2012-02)

Anisotropic wet chemical etching of quartz is a bulk micromachining process for the fabrication of micro-electro-mechanical systems (MEMS), such as resonators and temperature sensors. Despite the success of the continuous ...
Implementation and evaluation of the Level Set method: towards efficient and accurate simulation of wet etching for microengineering applications

Montoliu Álvaro, Carles; Ferrando Jódar, Néstor; Gosalvez, Miguel Ángel; Cerdá Boluda, Joaquín; Colom Palero, Ricardo José (Elsevier, 2013-10)

The use of atomistic methods, such as the Continuous Cellular Automaton (CCA), is currently regarded as a computationally efficient and experimentally accurate approach for the simulation of anisotropic etching of various ...

Mostrando ítems 1-2 de 2