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Listar por palabra clave "Displacement Talbot lithography"

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Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography

Gómez-Hernández, Víctor Jesús; Graczyk, Mariusz; Jam, Reza Jafari; Lehmann, Sebastian; Maximov, Ivan (IOP Publishing, 2020-05-01)

[EN] In this manuscript, we demonstrate the potential of replacing the standard bottom anti-reflective coating (BARC) with a polymethylglutarimide (PMGI) layer for wafer-scale nanofabrication by means of deep-UV displacement ...

Mostrando ítems 1-1 de 1