Larrea-Luzuriaga, Roberto Alejandro; Gutiérrez Campo, Ana María; Hurtado Montañés, Juan; Ramirez, J. M.; Garrido, B.; Sanchis Kilders, Pablo(Optical Society of America, 2017-02-01)
In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer ...