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Listar por palabra clave "Remote plasma source"

RiuNet: Repositorio Institucional de la Universidad Politécnica de Valencia

Listar por palabra clave "Remote plasma source"

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    Modelling and Study of a Microwave Plasma Source for High-rate Etching 
    Pauly, Steffen; Schulz, Andreas; Walker, Matthias; Gorath, K.; Baumgärtner, Klaus; Tovar, Günter (Editorial Universitat Politècnica de València, 2019-10-15)
    [EN] The aim of this study is to investigate and to optimize an existing microwave-powered remote plasma source (RPS) with respect to the etching rate and gas temperature and to simplify the setup to save production ...