RiuNet repositorio UPV
:
Listar por palabra clave

Buscar en RiuNet

Listar

Todo RiuNet

Mi cuenta

Acceder

Ayuda RiuNet

Admin. UPV

Listar por palabra clave "SiO2 etching"

Mostrando ítems 1-1 de 1

Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set method

Montoliu Álvaro, Carles; Baer, E; Cerdá Boluda, Joaquín; Colom Palero, Ricardo José (IOP Publishing: Hybrid Open Access, 2015)

We present a three-dimensional simulator of silicon dioxide etching in a uorocarbon plasma process. Explicit parametrization of the surface is currently one of the most frequently used methods to evolve the etched surface ...

Mostrando ítems 1-1 de 1