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Listar por palabra clave "248 nm excimer laser"

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Listar por palabra clave "248 nm excimer laser"

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    Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing 
    Sanza, F. J.; Laguna, Mari Fé; Casquel Del Campo, Rafael; Holgado, M.; Angulo Barrios, Carlos; Ortega Higueruelo, Francisco José; López-Romero, D.; García-Ballesteros, J.J.; Bañuls Polo, Mª José; Maquieira Catala, Ángel; Puchades Pla, Rosa (Elsevier, 2011-04-01)
    Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the ...