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Generation and modeling of gaseous plasmas using microwave (MW) power

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Generation and modeling of gaseous plasmas using microwave (MW) power

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Moisan, M.; Nowakowska, H. (2019). Generation and modeling of gaseous plasmas using microwave (MW) power. En AMPERE 2019. 17th International Conference on Microwave and High Frequency Heating. Editorial Universitat Politècnica de València. 27-34. https://doi.org/10.4995/AMPERE2019.2019.9989

Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/130714

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Title: Generation and modeling of gaseous plasmas using microwave (MW) power
Author: Moisan, Michel Nowakowska, H.
Issued date:
Abstract:
[EN] In contrast to RF produced plasmas, in the case of microwave plasmas the energy from the electromagnetic (EM) field is communicated only to electrons since ions, being a few thousand times much heavier than electrons, ...[+]
Subjects: Energy Production by Microwaves , Microwave CVD , EM Modelling , Microwave Material interaction , Dielectric Properties , Dielectric Properties Measurement , Solid State Microwave , Microwave Processing , Microwave Chemistry , Microwave applicators design
Copyrigths: Reconocimiento - No comercial - Sin obra derivada (by-nc-nd)
ISBN: 9788490487198
Source:
AMPERE 2019. 17th International Conference on Microwave and High Frequency Heating.
DOI: 10.4995/AMPERE2019.2019.9989
Publisher:
Editorial Universitat Politècnica de València
Publisher version: http://ocs.editorial.upv.es/index.php/AMPERE2019/AMPERE2019/paper/view/9989
Conference name: Ampere 2019
Conference place: Valencia, Spain
Conference date: Septiembre 09-12,2019
Type: Capítulo de libro Comunicación en congreso

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