Experimental characterisation of a research facility for use as cleanroom and containment enclosure

Abstract

[EN] This report documents the experimental characterisation and setting-up of a cleanroom that has been built at the von Karman Institute. It is a required process that will allow researchers to operate the facility for research activities. Taking into account the related norms in terms of operation, cleanliness and testing is of crucial importance for homologating a cleanroom. First, this work presents a dedicate analysis of the di erent ISO standards concerning cleanrooms. Secondly, a speci c design of experiments is made in order to check that the standards are ful lled. This leads to a test campaign whose results appear in the document. Finally, the obtained results are analysed in order to validate the performance of the facility. According to these results, the facility can be categorised as an ISO Class 5 cleanroom.