Muñoz, P.; Van Dijk, PWL.; Geuzebroek, D.; Geiselmann, M.; Domínguez, C.; Stassen, A.; Doménech, JD.... (2019). Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared. IEEE Journal of Selected Topics in Quantum Electronics. 25(5). https://doi.org/10.1109/JSTQE.2019.2902903
Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/202303
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Título:
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Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared
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Autor:
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Muñoz, Pascual
van Dijk, Paulus W. L.
Geuzebroek, Douwe
Geiselmann, Michael
Domínguez, Carlos
Stassen, Andim
Doménech, José David
Zervas, Michael
Leinse, Arne
Roeloffzen, Chris G.H.
Gargallo, Bernardo
Baños, Rocio
Fernández, Juan
Mico-Cabanes, Gloria
Bru-Orgiles, Luis Alberto
Pastor Abellán, Daniel
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Entidad UPV:
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Universitat Politècnica de València. Escuela Técnica Superior de Ingenieros de Telecomunicación - Escola Tècnica Superior d'Enginyers de Telecomunicació
Universitat Politècnica de València. Área de la Ciudad Politécnica de la Innovación - Àrea de la Ciutat Politècnica de la Innovació
Universitat Politècnica de València. Instituto Universitario de Telecomunicación y Aplicaciones Multimedia - Institut Universitari de Telecomunicacions i Aplicacions Multimèdia
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Fecha difusión:
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Resumen:
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[EN]
Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic-integrated circuit industry developments of the past century. Several monolithic technologies ...[+]
[EN]
Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic-integrated circuit industry developments of the past century. Several monolithic technologies exist, based on silicon and III-V semiconductors. In this paper, we discuss the current state and forthcoming developments of open access photonic foundries whose technology platforms are based on silicon nitride material. The paper presents various silicon nitride technologies and foundries, alongside with access models supported by generic integration and process design kits. Technical features, enabled by different micro-fabrication processes and tools are summarized. Application examples and developments of forthcoming incorporation into these platforms are outlined.
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Palabras clave:
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Photonic integration
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Silicon nitride
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Generic technology
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Foundry model
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Open access
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Silicon photonics
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Multi-project wafer
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Visible light
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Near-infrared
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Mid-infrared
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Tele/data-com
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Bio/life sciences
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Environmental sensing
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Automotive
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Derechos de uso:
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Reserva de todos los derechos
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Fuente:
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IEEE Journal of Selected Topics in Quantum Electronics. (issn:
1077-260X
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DOI:
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10.1109/JSTQE.2019.2902903
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Editorial:
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Institute of Electrical and Electronics Engineers
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Versión del editor:
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https://doi.org/10.1109/JSTQE.2019.2902903
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Código del Proyecto:
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info:eu-repo/grantAgreement/EC/H2020/687777/EU
...[+]
info:eu-repo/grantAgreement/EC/H2020/687777/EU
info:eu-repo/grantAgreement/EC/H2020/688519/EU
info:eu-repo/grantAgreement/EC/H2020/780537/EU
info:eu-repo/grantAgreement/MINECO//BES-2014-068523/ES/BES-2014-068523/
info:eu-repo/grantAgreement/MINECO//DI-15-08031/ES/DI-15-08031/
info:eu-repo/grantAgreement/MINECO//PTA2015-11309-I/ES/PTA2015-11309-I/
info:eu-repo/grantAgreement/MINECO//PTQ-15-07966/ES/PTQ-15-07966/
info:eu-repo/grantAgreement/AEI//TEC2016-80385-P//SILICON NITRIDE SPECTROMETERS/
info:eu-repo/grantAgreement/MINECO//TEC2014-54449-C3-1-R//BIOSENSORES DE LARGA DURACION INTEGRADOS EN TECNOLOGIA PLANAR PARA ANALISIS BIOQUIMICO EN LOC/
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Agradecimientos:
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This work was supported in part by the Spanish MINECO projects TEC2016-80385-P SINXPECT, in part by TEC2014-54449-C3-1-R, in part by the EC H2020-ICT-27-2015 PICs4all CSA 687777, in part by the DARPA DODOS program, in part ...[+]
This work was supported in part by the Spanish MINECO projects TEC2016-80385-P SINXPECT, in part by TEC2014-54449-C3-1-R, in part by the EC H2020-ICT-27-2015 PICs4all CSA 687777, in part by the DARPA DODOS program, in part by H2020-ICT-2017-1 MOICANA RIA 780537, and in part by PIX4life IP 688519. The work of R. Banos was supported by PTQ-15-07966. The work of J. Fernandez was supported by DI-15-08031. The work of G. M. Cabanes was supported by BES-2014-068523. The work of L. A. Bru was supported by PTA2015-11309-I.
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Tipo:
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Artículo
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