Anillos resonantes en SOI para aplicaciones de sensado

Abstract

[ES] Trabajo de investigación en el cual se desarrolla un a plataforma nueva de detección de diferentes substancias mediante la utilización de anillos resonantes fabricados en Silico. Además se ha llevado a cabola integración del sistema de microfluidos y se ha realizado la monitorización de los pasos de la detección de una cadena complementaria de ADN

[EN] We reported the study of the applications of the sensors based in Silicon on Insulator and the different structures were reviewed such as surface Plasmon resonance or photonic crystals. A novel lab on a chip platform using an array of 20 microrings was fabricated in SOI in the clean room through the integration of the micro channels in PDMS allowing the delivery of the substance in the different sensors. We also report the different physical parameters for optimizing the structures and polarization by using different configuration set ups. We have compared the sensitivity between TM and TE configuration obtaining the best one for TM. We report experimental results of the surface modification for the detection of the single strand DNA using the micro fluidics system. In these measurements we saw the shift of the peaks as the different steps were carrying out by monitoring continuously and simultaneity 20 ring resonators achieving, finally the detection of the hybridization of the complementary strand of DNA.