Aamer, M.; Gutiérrez Campo, AM.; Brimont, ACJ.; Vermeulen, D.; Roelkens, G.; Fedeli, J.; Håkansson, OA.... (2012). A CMOS Compatible Silicon-on-Insulator Polarization Rotator Based on Symmetry Breaking of the Waveguide Cross Section. IEEE Photonics Technology Letters. 24(22):2031-2034. https://doi.org/10.1109/LPT.2012.2218593
Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/38055
Title:
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A CMOS Compatible Silicon-on-Insulator Polarization Rotator Based on Symmetry Breaking of the Waveguide Cross Section
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Author:
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Aamer, Mariam
Gutiérrez Campo, Ana María
Brimont, Antoine Christian Jacques
Vermeulen, Diedrik
Roelkens, Gunther
Fedeli, Jean-Marc
Håkansson, Ola Andreas
Sanchis Kilders, Pablo
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UPV Unit:
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Universitat Politècnica de València. Instituto Universitario de Tecnología Nanofotónica - Institut Universitari de Tecnologia Nanofotònica
Universitat Politècnica de València. Departamento de Comunicaciones - Departament de Comunicacions
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Issued date:
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Abstract:
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[EN] A polarization rotator in silicon-on-insulator technology based on breaking the symmetry of the waveguide cross section is reported. The 25-mu m-long device is designed to be integrated with standard grating couplers ...[+]
[EN] A polarization rotator in silicon-on-insulator technology based on breaking the symmetry of the waveguide cross section is reported. The 25-mu m-long device is designed to be integrated with standard grating couplers without the need for extra fabrication steps. Hence, fabrication is carried out by a 2-etch-step complementary metal-oxide-semiconductor compatible process using 193-nm deep ultraviolet lithography. A polarization conversion efficiency of more than -0.85 dB with insertion losses ranging from -1 to -2.5 dB over a wavelength range of 30 nm is demonstrated. © 1989-2012 IEEE
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Subjects:
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Integrated optics
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Polarization rotator
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Silicon-on-insulator (SOI)
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CMOS Compatible
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Compatible process
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Complementary metal oxide semiconductors
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Deep ultraviolet lithography
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Grating couplers
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Polarization conversion
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Silicon on insulator
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Silicon-on-insulators
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Siliconon-insulator technology (SOI)
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Symmetry-breaking
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Waveguide cross section
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Wavelength ranges
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Circular waveguides
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Conversion efficiency
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Automobile manufacture
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Copyrigths:
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Reserva de todos los derechos
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Source:
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IEEE Photonics Technology Letters. (issn:
1041-1135
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DOI:
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10.1109/LPT.2012.2218593
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Publisher:
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Institute of Electrical and Electronics Engineers (IEEE)
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Publisher version:
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http://dx.doi.org/10.1109/LPT.2012.2218593
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Project ID:
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info:eu-repo/grantAgreement/EC/FP7/224312/EU/pHotonics ELectronics functional Integration on CMOS/
info:eu-repo/grantAgreement/MICINN//TEC2008-06333/ES/DISPOSITIVOS NANOFOTONICOS EN SILICIO/
info:eu-repo/grantAgreement/GVA//PROMETEO%2F2010%2F087/ES/DESARROLLO DE NUEVOS DISPOSITIVOS NANOFOTONICOS BASADOS EN GUIAS DE SILICIO Y METAMATERIALES/
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Thanks:
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This work was supported by the European Commission under Project HELIOS (pHotonics Electronics functional Integration on CMOS), FP7-224312, TEC2008-06333 SINADEC and PROMETEO-2010-087 R&D Excellency Program (NANOMET).
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Type:
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Artículo
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