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Arbitrary Coupling Ratio Multimode Interference Couplers in Silicon-on-Insulator

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Arbitrary Coupling Ratio Multimode Interference Couplers in Silicon-on-Insulator

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dc.contributor.author Doménech Gómez, José David es_ES
dc.contributor.author Sánchez Fandiño, Javier Antonio es_ES
dc.contributor.author Gargallo Jaquotot, Bernardo Andrés es_ES
dc.contributor.author Muñoz Muñoz, Pascual es_ES
dc.date.accessioned 2015-11-17T06:59:29Z
dc.date.available 2015-11-17T06:59:29Z
dc.date.issued 2014-07
dc.identifier.issn 0733-8724
dc.identifier.uri http://hdl.handle.net/10251/57567
dc.description.abstract In this paper, we present the design, manufacturing, characterization, and analysis of the coupling ratio spectral response for multimode interference couplers in silicon-on-insulator (SOI) technology. The couplers were designed using a Si rib waveguide with SiO2 cladding, on a regular 220 nm film and 2 μm buried oxide SOI wafer. A set of eight different designs, three canonical and five using a widened/narrowed coupler body, have been subject of study, with coupling ratios 50:50, 85:15, and 72:28 for the former, and 95:05, 85:15, 75:25, 65:35, and 55:45 for the latter. Two wafers of devices were fabricated, using two different etch depths for the rib waveguides. A set of six dies, three per wafer, whose line metrology matched the design, were retained for characterization. The coupling ratios obtained in the experimental results match, with little deviations, the design targets for a wavelength range between 1525 and 1575 nm, as inferred from spectral measurements and statistical analyses. Excess loss for all the devices is conservatively estimated to be approximately 0.6 dB in average. All the design parameters, body width and length, input/output positions and widths, and tapers dimensions are disclosed for reference. es_ES
dc.description.sponsorship This work was supported by the Spanish CDTI NEOTEC start-up program, the Spanish MICINN project TEC2010-21337, acronym ATOMIC, the Spanish MINECO project TEC2013-42332-P, acronym PIC4ESP, project FEDER UPVOV 10-3E-492, and project FEDER UPVOV 08-3E-008. The work of B. Gargallo was supported by FPI under Grant BES-2011-046100. The work of J.S. Fandino was supported by FPU under grant AP2010-1595. en_EN
dc.language Inglés es_ES
dc.publisher Institute of Electrical and Electronics Engineers (IEEE) es_ES
dc.relation Spanish CDTI NEOTEC start-up program es_ES
dc.relation Spanish MICINN project, ATOMIC TEC2010-21337 es_ES
dc.relation Spanish MINECO project, PIC4ESP TEC2013-42332-P es_ES
dc.relation FEDER UPVOV 10-3E-492 es_ES
dc.relation FEDER UPVOV 08-3E-008 es_ES
dc.relation FPI BES-2011-046100 es_ES
dc.relation FPU AP2010-1595 es_ES
dc.relation.ispartof Journal of Lightwave Technology es_ES
dc.rights Reserva de todos los derechos es_ES
dc.subject Coupling ratio es_ES
dc.subject Multimode interference coupler es_ES
dc.subject Performance statistics es_ES
dc.subject Silicon-on-insulator (SOI) es_ES
dc.subject Variation analysis es_ES
dc.subject.classification TEORIA DE LA SEÑAL Y COMUNICACIONES es_ES
dc.title Arbitrary Coupling Ratio Multimode Interference Couplers in Silicon-on-Insulator es_ES
dc.type Artículo es_ES
dc.identifier.doi 10.1109/JLT.2014.2329994
dc.rights.accessRights Abierto es_ES
dc.contributor.affiliation Universitat Politècnica de València. Instituto Universitario de Telecomunicación y Aplicaciones Multimedia - Institut Universitari de Telecomunicacions i Aplicacions Multimèdia es_ES
dc.contributor.affiliation Universitat Politècnica de València. Departamento de Comunicaciones - Departament de Comunicacions es_ES
dc.description.bibliographicCitation Doménech Gómez, JD.; Sanchez Fandiño, JA.; Gargallo Jaquotot, BA.; Muñoz Muñoz, P. (2014). Arbitrary Coupling Ratio Multimode Interference Couplers in Silicon-on-Insulator. Journal of Lightwave Technology. 32(14):2536-2543. doi:10.1109/JLT.2014.2329994 es_ES
dc.description.accrualMethod Senia es_ES
dc.relation.publisherversion http://dx.doi.org/ 10.1109/JLT.2014.2329994 es_ES
dc.description.upvformatpinicio 2536 es_ES
dc.description.upvformatpfin 2543 es_ES
dc.type.version info:eu-repo/semantics/publishedVersion es_ES
dc.description.volume 32 es_ES
dc.description.issue 14 es_ES
dc.relation.senia 279191 es_ES
dc.identifier.eissn 1558-2213


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