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Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

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Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

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Gosalvez Ayuso, MA.; Pal, P.; Ferrando Jódar, N.; Sato, K. (2011). Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples. Journal of Micromechanics and Microengineering. 21(12):1-12. doi:10.1088/0960-1317/21/12/125008

Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/76647

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Title: Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
Author: Gosalvez Ayuso, Miguel Angel Pal, Prem Ferrando Jódar, Néstor Sato, Kazuo
UPV Unit: Universitat Politècnica de València. Instituto de Instrumentación para Imagen Molecular - Institut d'Instrumentació per a Imatge Molecular
Issued date:
Abstract:
As a sequel to part I (Gosalvez et al J. Micromech. Microeng. 12 125007), the present paper is part II of a series of two papers dedicated to the presentation of a novel, large-throughput, experimental procedure to determine ...[+]
Copyrigths: Cerrado
Source:
Journal of Micromechanics and Microengineering. (issn: 0960-1317 )
DOI: 10.1088/0960-1317/21/12/125008
Publisher:
IOP Publishing
Publisher version: http://dx.doi.org/10.1088/0960-1317/21/12/125008
Thanks:
We acknowledge support by the Ramon y Cajal Fellowship Program by the Spanish Ministry of Science and Innovation, Spanish CICYT FIS2010-21216-C02-02 grant, MEXT Grant in Aid Research (Kakenhi: (A) 19201026), JSPS Postdoctoral ...[+]
Type: Artículo

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