Compact focusing grating couplers for silicon horizontal slot waveguides

Larrea-Luzuriaga, Roberto Alejandro; Gutiérrez Campo, Ana María; Hurtado Montañés, Juan; Ramirez, J. M.; Garrido, B.; Sanchis Kilders, Pablo

doi:10.1364/OL.42.000490

Compact focusing grating couplers for silicon horizontal slot waveguides

Archivos

Larrea-Luzuriaga;Gutierrez;Hurtado - Compact focusing grating couplers for silicon horizontal slo....pdf (1.53 MB)

Fecha

2017-02-01

Autores

Larrea-Luzuriaga, Roberto Alejandro

Gutiérrez Campo, Ana María

Hurtado Montañés, Juan

Ramirez, J. M.

Garrido, B.

Sanchis Kilders, Pablo

Unidades organizativas

Escuela Técnica Superior de Ingeniería de Telecomunicación

Departamento de Comunicaciones

Instituto Universitario de Tecnología Nanofotónica

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Handle

https://riunet.upv.es/handle/10251/79275

Cita bibliográfica

Larrea-Luzuriaga, RA.; Gutiérrez Campo, AM.; Hurtado Montañés, J.; Ramirez, JM.; Garrido, B.; Sanchis Kilders, P. (2017). Compact focusing grating couplers for silicon horizontal slot waveguides. Optics Letters. 42(3):490-493. https://doi.org/10.1364/OL.42.000490

Resumen

In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer sandwiched between amorphous silicon and a silicon-on-insulator. The measured coupling losses are about 4 dB with a 3 dB bandwidth of 38 nm. The fully etched configuration allows the fabrication in a single lithography step.