Sameshima, T.; Kikuchi, T.; Uehara, T.; Arima, T.; Hasumi, M.; Miyazaki, T.; Kobayashi, G.... (2019). Microwave rapid heating system using carbon heating tube. En AMPERE 2019. 17th International Conference on Microwave and High Frequency Heating. Editorial Universitat Politècnica de València. 318-325. https://doi.org/10.4995/AMPERE2019.2019.9756
Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/130656
Title:
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Microwave rapid heating system using carbon heating tube
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Author:
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Sameshima, Toshiyuki
Kikuchi, T.
Uehara, T.
Arima, T.
Hasumi, M.
Miyazaki, T.
Kobayashi, G.
Serizawa, I.
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Issued date:
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Abstract:
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[EN] We report a microwave heating system with a carbon heating tube (CHT) made by a 4-mm diameter quartz tube filled carbon particles and Ar gas at 1400 Pa. 2.45-GHz microwave at 200 W was introduced to a 300-dimameter ...[+]
[EN] We report a microwave heating system with a carbon heating tube (CHT) made by a 4-mm diameter quartz tube filled carbon particles and Ar gas at 1400 Pa. 2.45-GHz microwave at 200 W was introduced to a 300-dimameter metal cavity, in which 60-mm-long CHT was set at the central position. The numerical simulation with a finite element moment method resulted in the standing wave of the electric field caused by three dimensional Fresnel interference effect with low high electric field intensity ranging from from 1 to 6 kV/m because of effective absorption of microwave power by the CHT. The lowest average electrical field intensity of 5 kV/m in the cavity space was given by the electrical conductivity of carbon ranging from 10 to 55 S/m. The CHT with 55 S/m heated to 1200oC by microwave irradiation at 200 W. This heating method was applied to activate 1.0x1015-cm-2 boron and phosphorus implanted regions in n-type crystalline silicon substrate to fabricate pn junction and solar cells. The CHT heating at 1200oC realized decrease in the sheet resistivity to 146 Ω/sq, decrease in the density of defect states to 1.3x1011 and 9.2x1010 cm-2 for boron (p+) and phosphorus (n+) implanted surfaces, and solar cell characteristic with a conversion efficiency of 15% under illumination of air mass 1.5 at 0.1 W/cm2.
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Subjects:
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Energy Production by Microwaves
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Microwave CVD
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EM Modelling
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Microwave Material interaction
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Dielectric Properties
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Dielectric Properties Measurement
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Solid State Microwave
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Microwave Processing
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Microwave Chemistry
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Microwave applicators design
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Copyrigths:
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Reconocimiento - No comercial - Sin obra derivada (by-nc-nd)
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ISBN:
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9788490487198
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Source:
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AMPERE 2019. 17th International Conference on Microwave and High Frequency Heating.
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DOI:
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10.4995/AMPERE2019.2019.9756
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Publisher:
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Editorial Universitat Politècnica de València
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Publisher version:
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http://ocs.editorial.upv.es/index.php/AMPERE2019/AMPERE2019/paper/view/9756
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Conference name:
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Ampere 2019
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Conference place:
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Valencia, Spain
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Conference date:
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Septiembre 09-12,2019
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Type:
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Capítulo de libro
Comunicación en congreso
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