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Ultra-low loss hybrid ITO/Si thermo-optic phase shifter with optimized power consumption

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Ultra-low loss hybrid ITO/Si thermo-optic phase shifter with optimized power consumption

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dc.contributor.author Parra Gómez, Jorge es_ES
dc.contributor.author Hurtado Montañés, Juan es_ES
dc.contributor.author Griol Barres, Amadeu es_ES
dc.contributor.author Sanchis Kilders, Pablo es_ES
dc.date.accessioned 2020-05-07T05:57:29Z
dc.date.available 2020-05-07T05:57:29Z
dc.date.issued 2020-03-30 es_ES
dc.identifier.issn 1094-4087 es_ES
dc.identifier.uri http://hdl.handle.net/10251/142686
dc.description © 2020 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited" es_ES
dc.description.abstract [EN] Typically, materials with large optical losses such as metals are used as microheaters for silicon based thermo-optic phase shifters. Consequently, the heater must be placed far from the waveguide, which could come at the expense of the phase shifter performance. Reducing the gap between the waveguide and the heater allows reducing the power consumption or increasing the switching speed. In this work, we propose an ultra-low loss microheater for thermo-optic tuning by using a CMOS-compatible transparent conducting oxide such as indium tin oxide (ITO) with the aim of drastically reducing the gap. Using finite element method simulations, ITO and Ti based heaters are compared for different cladding configurations and TE and TM polarizations. Furthermore, the proposed ITO based microheaters have also been fabricated using the optimum gap and cladding configuration. Experimental results show power consumption to achieve a pi phase shift of 10 mW and switching time of a few microseconds for a 50 mu m long ITO heater. The obtained results demonstrate the potential of using ITO as an ultra-low loss microheater for high performance silicon thermo-optic tuning and open an alternative way for enabling the large-scale integration of phase shifters required in emerging integrated photonic applications. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement es_ES
dc.description.sponsorship Ministerio de Economía y Competitividad (TEC2016-76849); Generalitat Valenciana (PROMETEO/2019/123); Ministerio de Ciencia, Innovación y Universidades (FPU17/04224). es_ES
dc.language Inglés es_ES
dc.publisher The Optical Society es_ES
dc.relation MINECO/TEC2016-76849-C2-2-R es_ES
dc.relation MICIU/FPU17/04224 es_ES
dc.relation GV/PROMETEO/2019/123 es_ES
dc.relation.ispartof Optics Express es_ES
dc.rights Reconocimiento - No comercial (by-nc) es_ES
dc.subject Electrical-properties es_ES
dc.subject Nanocavity modulator es_ES
dc.subject Silicon es_ES
dc.subject Compact es_ES
dc.subject Microheaters es_ES
dc.subject Photonics es_ES
dc.subject Heater es_ES
dc.subject Switch es_ES
dc.subject Films es_ES
dc.subject.classification TEORIA DE LA SEÑAL Y COMUNICACIONES es_ES
dc.title Ultra-low loss hybrid ITO/Si thermo-optic phase shifter with optimized power consumption es_ES
dc.type Artículo es_ES
dc.identifier.doi 10.1364/OE.386959 es_ES
dc.rights.accessRights Abierto es_ES
dc.contributor.affiliation Universitat Politècnica de València. Instituto Universitario de Tecnología Nanofotónica - Institut Universitari de Tecnologia Nanofotònica es_ES
dc.contributor.affiliation Universitat Politècnica de València. Departamento de Comunicaciones - Departament de Comunicacions es_ES
dc.description.bibliographicCitation Parra Gómez, J.; Hurtado Montañés, J.; Griol Barres, A.; Sanchis Kilders, P. (2020). Ultra-low loss hybrid ITO/Si thermo-optic phase shifter with optimized power consumption. Optics Express. 28(7):9393-9404. https://doi.org/10.1364/OE.386959 es_ES
dc.description.accrualMethod S es_ES
dc.relation.publisherversion https://doi.org/10.1364/OE.386959 es_ES
dc.description.upvformatpinicio 9393 es_ES
dc.description.upvformatpfin 9404 es_ES
dc.type.version info:eu-repo/semantics/publishedVersion es_ES
dc.description.volume 28 es_ES
dc.description.issue 7 es_ES
dc.relation.pasarela S\406023 es_ES
dc.contributor.funder Generalitat Valenciana es_ES
dc.contributor.funder Ministerio de Economía y Competitividad es_ES
dc.contributor.funder Ministerio de Ciencia, Innovación y Universidades es_ES
dc.relation.references Komma, J., Schwarz, C., Hofmann, G., Heinert, D., & Nawrodt, R. (2012). Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures. Applied Physics Letters, 101(4), 041905. doi:10.1063/1.4738989 es_ES
dc.relation.references Sun, J., Timurdogan, E., Yaacobi, A., Hosseini, E. S., & Watts, M. R. (2013). Large-scale nanophotonic phased array. Nature, 493(7431), 195-199. doi:10.1038/nature11727 es_ES
dc.relation.references Shen, Y., Harris, N. C., Skirlo, S., Prabhu, M., Baehr-Jones, T., Hochberg, M., … Soljačić, M. (2017). Deep learning with coherent nanophotonic circuits. Nature Photonics, 11(7), 441-446. doi:10.1038/nphoton.2017.93 es_ES
dc.relation.references Atabaki, A. H., Moazeni, S., Pavanello, F., Gevorgyan, H., Notaros, J., Alloatti, L., … Ram, R. J. (2018). Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip. Nature, 556(7701), 349-354. doi:10.1038/s41586-018-0028-z es_ES
dc.relation.references Pérez, D., Gasulla, I., Crudgington, L., Thomson, D. J., Khokhar, A. Z., Li, K., … Capmany, J. (2017). Multipurpose silicon photonics signal processor core. Nature Communications, 8(1). doi:10.1038/s41467-017-00714-1 es_ES
dc.relation.references Sun, P., & Reano, R. M. (2010). Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides. Optics Express, 18(8), 8406. doi:10.1364/oe.18.008406 es_ES
dc.relation.references Atabaki, A. H., Eftekhar, A. A., Yegnanarayanan, S., & Adibi, A. (2013). Sub-100-nanosecond thermal reconfiguration of silicon photonic devices. Optics Express, 21(13), 15706. doi:10.1364/oe.21.015706 es_ES
dc.relation.references Masood, A., Pantouvaki, M., Goossens, D., Lepage, G., Verheyen, P., Van Campenhout, J., … Bogaerts, W. (2014). Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices. Optical Materials Express, 4(7), 1383. doi:10.1364/ome.4.001383 es_ES
dc.relation.references Rosa, Á., Gutiérrez, A., Brimont, A., Griol, A., & Sanchis, P. (2016). High performace silicon 2x2 optical switch based on a thermo-optically tunable multimode interference coupler and efficient electrodes. Optics Express, 24(1), 191. doi:10.1364/oe.24.000191 es_ES
dc.relation.references Jacques, M., Samani, A., El-Fiky, E., Patel, D., Xing, Z., & Plant, D. V. (2019). Optimization of thermo-optic phase-shifter design and mitigation of thermal crosstalk on the SOI platform. Optics Express, 27(8), 10456. doi:10.1364/oe.27.010456 es_ES
dc.relation.references Wang, X., & Chiang, K. S. (2019). Polarization-insensitive mode-independent thermo-optic switch based on symmetric waveguide directional coupler. Optics Express, 27(24), 35385. doi:10.1364/oe.27.035385 es_ES
dc.relation.references Atabaki, A. H., Shah Hosseini, E., Eftekhar, A. A., Yegnanarayanan, S., & Adibi, A. (2010). Optimization of metallic microheaters for high-speed reconfigurable silicon photonics. Optics Express, 18(17), 18312. doi:10.1364/oe.18.018312 es_ES
dc.relation.references Yu, L., Yin, Y., Shi, Y., Dai, D., & He, S. (2016). Thermally tunable silicon photonic microdisk resonator with transparent graphene nanoheaters. Optica, 3(2), 159. doi:10.1364/optica.3.000159 es_ES
dc.relation.references Schall, D., Mohsin, M., Sagade, A. A., Otto, M., Chmielak, B., Suckow, S., … Kurz, H. (2016). Infrared transparent graphene heater for silicon photonic integrated circuits. Optics Express, 24(8), 7871. doi:10.1364/oe.24.007871 es_ES
dc.relation.references Yan, S., Zhu, X., Frandsen, L. H., Xiao, S., Mortensen, N. A., Dong, J., & Ding, Y. (2017). Slow-light-enhanced energy efficiency for graphene microheaters on silicon photonic crystal waveguides. Nature Communications, 8(1). doi:10.1038/ncomms14411 es_ES
dc.relation.references Xu, Z., Qiu, C., Yang, Y., Zhu, Q., Jiang, X., Zhang, Y., … Su, Y. (2017). Ultra-compact tunable silicon nanobeam cavity with an energy-efficient graphene micro-heater. Optics Express, 25(16), 19479. doi:10.1364/oe.25.019479 es_ES
dc.relation.references Lv, J., Yang, Y., Lin, B., Cao, Y., Zhang, Y., Li, S., … Zhang, D. (2019). Graphene-embedded first-order mode polymer Mach–Zender interferometer thermo-optic switch with low power consumption. Optics Letters, 44(18), 4606. doi:10.1364/ol.44.004606 es_ES
dc.relation.references Wang, X., Jin, W., Chang, Z., & Chiang, K. S. (2019). Buried graphene electrode heater for a polymer waveguide thermo-optic device. Optics Letters, 44(6), 1480. doi:10.1364/ol.44.001480 es_ES
dc.relation.references Lee, D.-J., Kim, H.-M., Kwon, J.-Y., Choi, H., Kim, S.-H., & Kim, K.-B. (2010). Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films. Advanced Functional Materials, 21(3), 448-455. doi:10.1002/adfm.201001342 es_ES
dc.relation.references Cleary, J. W., Smith, E. M., Leedy, K. D., Grzybowski, G., & Guo, J. (2018). Optical and electrical properties of ultra-thin indium tin oxide nanofilms on silicon for infrared photonics. Optical Materials Express, 8(5), 1231. doi:10.1364/ome.8.001231 es_ES
dc.relation.references Ray, S., Banerjee, R., Basu, N., Batabyal, A. K., & Barua, A. K. (1983). Properties of tin doped indium oxide thin films prepared by magnetron sputtering. Journal of Applied Physics, 54(6), 3497-3501. doi:10.1063/1.332415 es_ES
dc.relation.references Babicheva, V. E., Kinsey, N., Naik, G. V., Ferrera, M., Lavrinenko, A. V., Shalaev, V. M., & Boltasseva, A. (2013). Towards CMOS-compatible nanophotonics: Ultra-compact modulators using alternative plasmonic materials. Optics Express, 21(22), 27326. doi:10.1364/oe.21.027326 es_ES
dc.relation.references Sorger, V. J., Lanzillotti-Kimura, N. D., Ma, R.-M., & Zhang, X. (2012). Ultra-compact silicon nanophotonic modulator with broadband response. Nanophotonics, 1(1), 17-22. doi:10.1515/nanoph-2012-0009 es_ES
dc.relation.references Shi, K., Haque, R. R., Zhao, B., Zhao, R., & Lu, Z. (2014). Broadband electro-optical modulator based on transparent conducting oxide. Optics Letters, 39(17), 4978. doi:10.1364/ol.39.004978 es_ES
dc.relation.references Hoessbacher, C., Fedoryshyn, Y., Emboras, A., Melikyan, A., Kohl, M., Hillerkuss, D., … Leuthold, J. (2014). The plasmonic memristor: a latching optical switch. Optica, 1(4), 198. doi:10.1364/optica.1.000198 es_ES
dc.relation.references Liu, X., Zang, K., Kang, J.-H., Park, J., Harris, J. S., Kik, P. G., & Brongersma, M. L. (2018). Epsilon-Near-Zero Si Slot-Waveguide Modulator. ACS Photonics, 5(11), 4484-4490. doi:10.1021/acsphotonics.8b00945 es_ES
dc.relation.references Li, E., Gao, Q., Chen, R. T., & Wang, A. X. (2018). Ultracompact Silicon-Conductive Oxide Nanocavity Modulator with 0.02 Lambda-Cubic Active Volume. Nano Letters, 18(2), 1075-1081. doi:10.1021/acs.nanolett.7b04588 es_ES
dc.relation.references Li, E., Gao, Q., Liverman, S., & Wang, A. X. (2018). One-volt silicon photonic crystal nanocavity modulator with indium oxide gate. Optics Letters, 43(18), 4429. doi:10.1364/ol.43.004429 es_ES
dc.relation.references Amin, R., Maiti, R., Carfano, C., Ma, Z., Tahersima, M. H., Lilach, Y., … Sorger, V. J. (2018). 0.52 V mm ITO-based Mach-Zehnder modulator in silicon photonics. APL Photonics, 3(12), 126104. doi:10.1063/1.5052635 es_ES
dc.relation.references Gao, Q., Li, E., & Wang, A. X. (2018). Ultra-compact and broadband electro-absorption modulator using an epsilon-near-zero conductive oxide. Photonics Research, 6(4), 277. doi:10.1364/prj.6.000277 es_ES
dc.relation.references Wood, M. G., Campione, S., Parameswaran, S., Luk, T. S., Wendt, J. R., Serkland, D. K., & Keeler, G. A. (2018). Gigahertz speed operation of epsilon-near-zero silicon photonic modulators. Optica, 5(3), 233. doi:10.1364/optica.5.000233 es_ES
dc.relation.references Li, E., Nia, B. A., Zhou, B., & Wang, A. X. (2019). Transparent conductive oxide-gated silicon microring with extreme resonance wavelength tunability. Photonics Research, 7(4), 473. doi:10.1364/prj.7.000473 es_ES
dc.relation.references Parra, J., Olivares, I., Brimont, A., & Sanchis, P. (2019). Non-volatile epsilon-near-zero readout memory. Optics Letters, 44(16), 3932. doi:10.1364/ol.44.003932 es_ES
dc.relation.references Gui, Y., Miscuglio, M., Ma, Z., Tahersima, M. H., Sun, S., Amin, R., … Sorger, V. J. (2019). Towards integrated metatronics: a holistic approach on precise optical and electrical properties of Indium Tin Oxide. Scientific Reports, 9(1). doi:10.1038/s41598-019-47631-5 es_ES
dc.relation.references Xian, S., Nie, L., Qin, J., Kang, T., Li, C., Xie, J., … Bi, L. (2019). Effect of oxygen stoichiometry on the structure, optical and epsilon-near-zero properties of indium tin oxide films. Optics Express, 27(20), 28618. doi:10.1364/oe.27.028618 es_ES
dc.relation.references Michelotti, F., Dominici, L., Descrovi, E., Danz, N., & Menchini, F. (2009). Thickness dependence of surface plasmon polariton dispersion in transparent conducting oxide films at 155 μm. Optics Letters, 34(6), 839. doi:10.1364/ol.34.000839 es_ES
dc.relation.references Fang, X., & Yang, L. (2017). Thermal effect analysis of silicon microring optical switch for on-chip interconnect. Journal of Semiconductors, 38(10), 104004. doi:10.1088/1674-4926/38/10/104004 es_ES


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