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Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication

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Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication

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Koo, P.; Ruiz García, R. (2020). Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication. Applied Sciences. 10(17):1-17. https://doi.org/10.3390/app10175936

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Título: Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication
Autor: Koo, Pyung-Hoi Ruiz García, Rubén
Entidad UPV: Universitat Politècnica de València. Departamento de Estadística e Investigación Operativa Aplicadas y Calidad - Departament d'Estadística i Investigació Operativa Aplicades i Qualitat
Fecha difusión:
Resumen:
[EN] In semiconductor wafer fabrication (wafer fab), wafers go through hundreds of process steps on a variety of processing machines for electrical circuit building operations. One of the special features in the wafer fabs ...[+]
Palabras clave: Batch processors , Real-time control , Dispatching , Wafer fabrication , Semiconductor manufacturing , System-wide performance
Derechos de uso: Reconocimiento (by)
Fuente:
Applied Sciences. (eissn: 2076-3417 )
DOI: 10.3390/app10175936
Editorial:
MDPI AG
Versión del editor: https://doi.org/10.3390/app10175936
Código del Proyecto:
info:eu-repo/grantAgreement/PKNU//C-D-2016-0843/
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/RTI2018-094940-B-I00/ES/OPTIMIZACION DE OPERACIONES EN TERMINALES PORTUARIAS/
Agradecimientos:
This work was supported by the Pukyong National University Research Abroad Fund (C-D-2016-0843).
Tipo: Artículo

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