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Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared

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Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared

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dc.contributor.author Muñoz, Pascual es_ES
dc.contributor.author van Dijk, Paulus W. L. es_ES
dc.contributor.author Geuzebroek, Douwe es_ES
dc.contributor.author Geiselmann, Michael es_ES
dc.contributor.author Domínguez, Carlos es_ES
dc.contributor.author Stassen, Andim es_ES
dc.contributor.author Doménech, José David es_ES
dc.contributor.author Zervas, Michael es_ES
dc.contributor.author Leinse, Arne es_ES
dc.contributor.author Roeloffzen, Chris G.H. es_ES
dc.contributor.author Gargallo, Bernardo es_ES
dc.contributor.author Baños, Rocio es_ES
dc.contributor.author Fernández, Juan es_ES
dc.contributor.author Mico-Cabanes, Gloria es_ES
dc.contributor.author Bru-Orgiles, Luis Alberto es_ES
dc.contributor.author Pastor Abellán, Daniel es_ES
dc.date.accessioned 2024-02-01T19:01:23Z
dc.date.available 2024-02-01T19:01:23Z
dc.date.issued 2019-09 es_ES
dc.identifier.issn 1077-260X es_ES
dc.identifier.uri http://hdl.handle.net/10251/202303
dc.description.abstract [EN] Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic-integrated circuit industry developments of the past century. Several monolithic technologies exist, based on silicon and III-V semiconductors. In this paper, we discuss the current state and forthcoming developments of open access photonic foundries whose technology platforms are based on silicon nitride material. The paper presents various silicon nitride technologies and foundries, alongside with access models supported by generic integration and process design kits. Technical features, enabled by different micro-fabrication processes and tools are summarized. Application examples and developments of forthcoming incorporation into these platforms are outlined. es_ES
dc.description.sponsorship This work was supported in part by the Spanish MINECO projects TEC2016-80385-P SINXPECT, in part by TEC2014-54449-C3-1-R, in part by the EC H2020-ICT-27-2015 PICs4all CSA 687777, in part by the DARPA DODOS program, in part by H2020-ICT-2017-1 MOICANA RIA 780537, and in part by PIX4life IP 688519. The work of R. Banos was supported by PTQ-15-07966. The work of J. Fernandez was supported by DI-15-08031. The work of G. M. Cabanes was supported by BES-2014-068523. The work of L. A. Bru was supported by PTA2015-11309-I. es_ES
dc.language Inglés es_ES
dc.publisher Institute of Electrical and Electronics Engineers es_ES
dc.relation.ispartof IEEE Journal of Selected Topics in Quantum Electronics es_ES
dc.rights Reserva de todos los derechos es_ES
dc.subject Photonic integration es_ES
dc.subject Silicon nitride es_ES
dc.subject Generic technology es_ES
dc.subject Foundry model es_ES
dc.subject Open access es_ES
dc.subject Silicon photonics es_ES
dc.subject Multi-project wafer es_ES
dc.subject Visible light es_ES
dc.subject Near-infrared es_ES
dc.subject Mid-infrared es_ES
dc.subject Tele/data-com es_ES
dc.subject Bio/life sciences es_ES
dc.subject Environmental sensing es_ES
dc.subject Automotive es_ES
dc.subject.classification TEORÍA DE LA SEÑAL Y COMUNICACIONES es_ES
dc.title Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared es_ES
dc.type Artículo es_ES
dc.identifier.doi 10.1109/JSTQE.2019.2902903 es_ES
dc.relation.projectID info:eu-repo/grantAgreement/EC/H2020/687777/EU es_ES
dc.relation.projectID info:eu-repo/grantAgreement/EC/H2020/688519/EU es_ES
dc.relation.projectID info:eu-repo/grantAgreement/EC/H2020/780537/EU es_ES
dc.relation.projectID info:eu-repo/grantAgreement/MINECO//BES-2014-068523/ES/BES-2014-068523/ es_ES
dc.relation.projectID info:eu-repo/grantAgreement/MINECO//DI-15-08031/ES/DI-15-08031/ es_ES
dc.relation.projectID info:eu-repo/grantAgreement/MINECO//PTA2015-11309-I/ES/PTA2015-11309-I/ es_ES
dc.relation.projectID info:eu-repo/grantAgreement/MINECO//PTQ-15-07966/ES/PTQ-15-07966/ es_ES
dc.relation.projectID info:eu-repo/grantAgreement/AEI//TEC2016-80385-P//SILICON NITRIDE SPECTROMETERS/ es_ES
dc.relation.projectID info:eu-repo/grantAgreement/MINECO//TEC2014-54449-C3-1-R//BIOSENSORES DE LARGA DURACION INTEGRADOS EN TECNOLOGIA PLANAR PARA ANALISIS BIOQUIMICO EN LOC/ es_ES
dc.rights.accessRights Abierto es_ES
dc.contributor.affiliation Universitat Politècnica de València. Escuela Técnica Superior de Ingenieros de Telecomunicación - Escola Tècnica Superior d'Enginyers de Telecomunicació es_ES
dc.contributor.affiliation Universitat Politècnica de València. Área de la Ciudad Politécnica de la Innovación - Àrea de la Ciutat Politècnica de la Innovació es_ES
dc.contributor.affiliation Universitat Politècnica de València. Instituto Universitario de Telecomunicación y Aplicaciones Multimedia - Institut Universitari de Telecomunicacions i Aplicacions Multimèdia es_ES
dc.description.bibliographicCitation Muñoz, P.; Van Dijk, PWL.; Geuzebroek, D.; Geiselmann, M.; Domínguez, C.; Stassen, A.; Doménech, JD.... (2019). Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared. IEEE Journal of Selected Topics in Quantum Electronics. 25(5). https://doi.org/10.1109/JSTQE.2019.2902903 es_ES
dc.description.accrualMethod S es_ES
dc.relation.publisherversion https://doi.org/10.1109/JSTQE.2019.2902903 es_ES
dc.type.version info:eu-repo/semantics/publishedVersion es_ES
dc.description.volume 25 es_ES
dc.description.issue 5 es_ES
dc.relation.pasarela S\404342 es_ES
dc.contributor.funder European Commission es_ES
dc.contributor.funder AGENCIA ESTATAL DE INVESTIGACION es_ES
dc.contributor.funder MINISTERIO DE ECONOMIA Y EMPRESA es_ES
dc.contributor.funder Ministerio de Economía y Competitividad es_ES
dc.contributor.funder Defense Advanced Research Projects Agency es_ES


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