Sanza, FJ.; Laguna, MF.; Casquel Del Campo, R.; Holgado, M.; Angulo Barrios, C.; Ortega Higueruelo, FJ.; López-Romero, D.... (2011). Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing. Applied Surface Science. 257(12):5403-5407. https://doi.org/10.1016/j.apsusc.2010.10.010
Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/64611
Title:
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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing
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Author:
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Sanza, F. J.
Laguna, Mari Fé
Casquel Del Campo, Rafael
Holgado, M.
Angulo Barrios, Carlos
Ortega Higueruelo, Francisco José
López-Romero, D.
García-Ballesteros, J.J.
Bañuls Polo, Mª José
Maquieira Catala, Ángel
Puchades Pla, Rosa
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UPV Unit:
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Universitat Politècnica de València. Instituto Universitario de Tecnología Nanofotónica - Institut Universitari de Tecnologia Nanofotònica
Universitat Politècnica de València. Instituto de Reconocimiento Molecular y Desarrollo Tecnológico - Institut de Reconeixement Molecular i Desenvolupament Tecnològic
Universitat Politècnica de València. Departamento de Química - Departament de Química
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Issued date:
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Abstract:
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Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the ...[+]
Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the most critical are exposure dose and post-bake condition. Also a novel and cost effective type of photomask based on commercial polyimide Kapton produced by 355 nm DPSS laser microprocessing was developed, studying the influence of the cutting conditions on the photomask. Finally, as a likely application the biosensing capability with a standard BSA/antiBSA immunoassay over a 10 × 10 micro-plates square lattice of around 10 ¿m in diameter, 15 ¿m of spacing and 400 nm in height was demonstrated, finding a limit of detection (LOD) of 33.4 ng/ml which is in the order of magnitude of bioapplications such as detection of cortisol hormone or insulin-like growth factor. Low cost fabrication and vertical interrogation characterization techniques lead to a promising future in the biosensing technology field. © 2010 Elsevier B.V. All rights reserved.
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Subjects:
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Excimer laser
,
Label-free biosensing
,
Microfabrication
,
Photolithography
,
SU-8
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248 nm excimer laser
,
Bioapplications
,
Biosensing
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Biosensing capability
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Characterization techniques
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Cost effective
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Cutting conditions
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Excimers
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Exposure dose
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Insulin-like growth factor
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Label free
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Laser lithography
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Laser micro processing
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Limit of detection
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Low cost fabrication
,
Order of magnitude
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Pattern geometry
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Silicon substrates
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Square lattices
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Technology fields
,
Cost effectiveness
,
Costs
,
Excimer lasers
,
Gas lasers
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Microanalysis
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Micromachining
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Photomasks
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Polyimides
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X ray lithography
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Copyrigths:
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Cerrado |
Source:
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Applied Surface Science. (issn:
0169-4332
) (eissn:
1873-5584
)
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DOI:
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10.1016/j.apsusc.2010.10.010
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Publisher:
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Elsevier
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Publisher version:
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http://dx.doi.org/10.1016/j.apsusc.2010.10.010
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Project ID:
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info:eu-repo/grantAgreement/MICINN//TEC2008-06574-C03-03/ES/DESARROLLO DE ESTRUCTURAS NANO-OPTO-FLUIDICAS/
info:eu-repo/grantAgreement/MICINN//TEC2008-06574-C03-02/ES/ESTRUCTURAS NANO-OPTO-FLUIDICAS PARA SENSADO BIOQUIMICO BASADO EN TECNICAS DE INTERROGACION OPTICA DE ALTA SENSIBILIDAD/
info:eu-repo/grantAgreement/MICINN//TEC2008-06574-C03-01/ES/ESTRUCTURAS NANO-OPTO-FLUIDICAS PARA SENSADO BIOQUIMICO BASADO EN TECNICAS DE INTERROGACION OPTICA DE ALTA SENSIBILIDAD/
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Thanks:
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Funding for the study was provided by the Spanish Ministry of Science and Innovation under BIOPSIA project no. TEC2008-06574-C03.
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Type:
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Artículo
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