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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

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Sanza, FJ.; Laguna, MF.; Casquel Del Campo, R.; Holgado, M.; Angulo Barrios, C.; Ortega Higueruelo, FJ.; López-Romero, D.... (2011). Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing. Applied Surface Science. 257(12):5403-5407. doi:10.1016/j.apsusc.2010.10.010

Por favor, use este identificador para citar o enlazar este ítem: http://hdl.handle.net/10251/64611

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Title: Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing
Author:
UPV Unit: Universitat Politècnica de València. Instituto Universitario de Tecnología Nanofotónica - Institut Universitari de Tecnologia Nanofotònica
Universitat Politècnica de València. Instituto de Reconocimiento Molecular y Desarrollo Tecnológico - Institut de Reconeixement Molecular i Desenvolupament Tecnològic
Universitat Politècnica de València. Departamento de Química - Departament de Química
Issued date:
Abstract:
Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the ...[+]
Subjects: Excimer laser , Label-free biosensing , Microfabrication , Photolithography , SU-8 , 248 nm excimer laser , Bioapplications , Biosensing , Biosensing capability , Characterization techniques , Cost effective , Cutting conditions , Excimers , Exposure dose , Insulin-like growth factor , Label free , Laser lithography , Laser micro processing , Limit of detection , Low cost fabrication , Order of magnitude , Pattern geometry , Silicon substrates , Square lattices , Technology fields , Cost effectiveness , Costs , Excimer lasers , Gas lasers , Microanalysis , Micromachining , Photomasks , Polyimides , X ray lithography
Copyrigths: Cerrado
Source:
Applied Surface Science. (issn: 0169-4332 ) (eissn: 1873-5584 )
DOI: 10.1016/j.apsusc.2010.10.010
Publisher:
Elsevier
Publisher version: http://dx.doi.org/10.1016/j.apsusc.2010.10.010
Thanks:
Funding for the study was provided by the Spanish Ministry of Science and Innovation under BIOPSIA project no. TEC2008-06574-C03.
Type: Artículo

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