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Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

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Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

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Ferrando Jódar, N.; Gosalvez Ayuso, MA.; Colom Palero, RJ. (2012). Evolutionary continuous cellular automaton for the simulation of wet etching of quartz. Journal of Micromechanics and Microengineering. 22(2). https://doi.org/10.1088/0960-1317/22/2/025021

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Título: Evolutionary continuous cellular automaton for the simulation of wet etching of quartz
Autor: Ferrando Jódar, Néstor Gosalvez Ayuso, Miguel Angel Colom Palero, Ricardo José
Entidad UPV: Universitat Politècnica de València. Instituto de Instrumentación para Imagen Molecular - Institut d'Instrumentació per a Imatge Molecular
Universitat Politècnica de València. Departamento de Ingeniería Electrónica - Departament d'Enginyeria Electrònica
Fecha difusión:
Resumen:
Anisotropic wet chemical etching of quartz is a bulk micromachining process for the fabrication of micro-electro-mechanical systems (MEMS), such as resonators and temperature sensors. Despite the success of the continuous ...[+]
Palabras clave: 3D simulations , Accurate modeling , Anisotropic wet chemical etching , Bulk- micromachining , Crystallographic structure , Etch rate distribution , MEMS-structure , Quantitative comparison , Removal rate , Surface atoms , Surface orientation , Cellular automata , Crystal atomic structure , MEMS , Quartz , Wet etching , Three dimensional computer graphics
Derechos de uso: Reserva de todos los derechos
Fuente:
Journal of Micromechanics and Microengineering. (issn: 0960-1317 ) (eissn: 1361-6439 )
DOI: 10.1088/0960-1317/22/2/025021
Editorial:
IOP Publishing: Hybrid Open Access
Versión del editor: http://dx.doi.org/10.1088/0960-1317/22/2/025021
Código del Proyecto:
info:eu-repo/grantAgreement/Eusko Jaurlaritza//IE11-304/
Agradecimientos:
We are grateful to D Cheng and K Sato (Nagoya University, Japan) for providing part of the experimental data. We acknowledge support by the JAE-Doc grant form the Junta para la Ampliacion de Estudios program co-funded by ...[+]
Tipo: Artículo

References

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